Products

k-Space is a leading manufacturer of in situ, in-line, and ex situ metrology tools designed to improve processes and increase profitability. Our thin film metrology tools are used to monitor nearly all thin-film deposition processes, including MBE, MOCVD, PLD, PVD, sputtering, and evaporation, as well as production. Our industrial metrology tools are used in multiple industries such as glass, automotive, and building supplies. Our products utilize optical imaging technology for non-contact, non-invasive measurement of a plethora of important parameters such as wafer and film temperature, thin-film stress and strain, wafer curvature, bow, and tilt, surface roughness and quality, film thickness and deposition rate, optical band gap, atomic spacing, and other custom non-contact measurements.

Applications

kSA products are used in a wide range of applications in industries such as glass, solar, automotive, building products, and other thin-film industries. kSA products measure and provide process control for important parameters such as dimensions, temperature, deposition rate, film thickness, stress, curvature, bow, reflectivity, surface roughness, and many other material properties. These are measured in real-time by utilizing probes such as lasers, white light, UV light sources, and electron beams to investigate at an atomic level.

Our thin-film analysis tools are used to extract real-time information from today’s most advanced deposition and processing applications within compound semiconductor, silicon semiconductor and photovoltaic advanced thin film production and R&D.

Our custom metrology tools are used for real-time data and process control in a variety of industrial applications.

Sophisticated software analysis and reporting capabilities provide information to better understand the end product or to provide online control during mass production to enhance yield. Tailored optics and fully integrated solutions have been designed for simple mounting and non-invasive monitoring of many applications such as:

Measurement Methods

When it comes to thin-film growth, having the right measurement technique with the accuracy you need is critical. We have been developing and perfecting our thin-film metrology since 1992. What do you want to measure?

Have a measurement challenge in mind?

One of the pillars of our success is standing by as consultants. We’re always here to talk about your project needs.

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