Data Display and Analysis
kSA Scanning Pyro performs fully automated temperature scans with automated statistical analysis for quick an easy carrier evaluation based on user defined scanning and analysis recipes. Line Profiles, 2-D and 3-D plots, and statistical analysis plots are some of the ways to display this data. A user defined circular or rectangular area of the carrier map can be displayed in separate windows for a “zoomed in” view in real-time or post acquisition. With the line profile selection tool, the user can place the line profile at any position, length, and line width, which allows for in depth analysis of the temperature profile across the carrier. Statistical analysis of the data using the mean, median, and standard deviation can help identify significant variations and can be used you to improve process control and wafer yield. All data may also be exported to an SQL database for further customer analysis and archiving.