Products
k-Space is a leading manufacturer of in situ, in-line, and ex situ thin film metrology tools designed to improve processes and increase profitability. Our thin film metrology tools are used to monitor nearly all thin-film deposition processes, including MBE, MOCVD, PLD, PVD, sputtering, and evaporation, as well as production. Our products utilize optical imaging technology for non-contact, non-invasive measurement of a plethora of important parameters such as wafer and film temperature, thin-film stress and strain, wafer curvature, bow, and tilt, surface roughness and quality, film thickness and deposition rate, optical band gap, atomic spacing, and other custom non-contact measurements.
kSA 400
The kSA 400 analytical Reflection High-Energy Electron Diffraction (RHEED) system...
kSA BandiT
A real time absolute temperature measurement in ranges that pyrometers...
kSA BandiT PV
Harness the power of this patented technology to improve your...
kSA MOS
Measure and provide feedback for curvature, stress, reflectivity and growth...
kSA MOS Ultra/ThermalScan
The kSA MOS UltraScan and kSA MOS ThermalScan systems are...
kSA ICE
The k-Space Integrated Control for Epitaxy system (ICE) is a...
kSA RateRat Pro
kSA RateRat Pro is a compact, convenient and easy-to-use optical...
kSA SpectraTemp
The kSA SpectraTemp is an easy to use, non-contact, optically-based...
kSA ScanningPyro
For use on Veeco K465i and EPIK700 MOCVD reactors, the...
kSA Emissometer
Open the door to a quantitative approach to wafer carrier characterization...