For use on Veeco K465i and EPIK700 MOCVD reactors, the kSA Scanning Pyro performs automated temperature mapping in order to measure temperature variations across wafer carriers and wafers. Use it to tune heater zones and optimize process and hardware to achieve higher yields, wafer uniformity and device performance.

kSA Scanning Pyro wafer carrier temperature mapping animationMOCVD fabs often perform spot temperature measurements on wafer carriers to help tune the heater zones in an attempt to achieve uniform temperature profiles.

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