The k-Space Integrated Control for Epitaxy system (ICE) is a modular in situ metrology tool designed for today’s MOCVD and MBE reactors. kSA ICE measures thin-film temperature, reflectivity, thickness, growth rate, stress and curvature. Each system is custom configured based on the modules that the user needs for their measurement, chamber, and materials.

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The k-Space Integrated Control for Epitaxy system (ICE) is a modular in situ metrology tool designed for today’s MOCVD and MBE reactors. By integrating various measurement modules into a single optics head, the kSA ICE metrology system can measure real-time temperature, reflectivity, growth rate, film thickness, substrate curvature, and film stress.

It combines kSA MOS, and kSA RateRat Pro patented technologies, along with an Emissivity Corrected Pyrometry (ICE-ECPR) module. The kSA ICE modular design allows the user to select the modules based on what they want to measure with their kSA ICE system. When ordering, some users keep other modules in mind for future expansion.

The kSA ICE tool can handle wafer-resolved measurement for rotation speeds up to 1,500 RPM. One of the many advantages of kSA ICE is that it fits in tight spaces and measures multiple thin-film parameters in one device.

The user selects the attributes that need to be measured, and k-Space will configure a tool with the appropriate modules specifically for you. k-Space prepares a custom quote for each tool based on measurement needs, deposition method, chamber configuration, and materials.

Keep cool while gaining insight into your MOCVD or MBE process, maximizing device performance, and limiting process variation to increase yields with kSA ICE!

For more information see the ICE for MOCVD Product Specification Sheet →
For more information see the ICE for MBE Product Specification Sheet →

The kSA ICE can incorporate three temperature measurement modules.

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