kSA BandiT

In situ measurement via Band Edge, Blackbody, and Pyrometry, typically used in MBE, PLD, ALD, sputtering, and e-beam evaporation deposition environment

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kSA BandiT PV metrology for the solar industry

kSA BandiT PV

In-line measurement via Band Edge, Blackbody, and Pyrometry, ideal for thin film photovoltaic metrology applications, including in-line production measurement.

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kSA ICE thin-film monitoring tool head


In situ modular tool for measurement via individual Emissivity Corrected Pyrometry (ECP), Blackbody, and/or Band Edge Modules, ideal for MOCVD reactors with either high speed or low speed rotation and limited optical access.

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kSA SpectraTemp on a chamber

kSA SpectraTemp

In situ tool for measuring the absolute temperature of semiconductor wafers, metals, ceramics, MOCVD carriers, and much more.  Can also be used to calibrate pyrometers and other blackbody-like sources.

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kSA scanning pyrometer for MOCVD in situ temperature measurement

kSA ScanningPyro

In Situ tool for creating high resolution, full temperature maps on Veeco K465i and EPIK700 wafer carriers and wafers.  Greatly enhances the ability to perform process optimization.

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