In situ measurement via Band Edge, Blackbody, and Pyrometry, typically used in MBE, PLD, ALD, sputtering, and e-beam evaporation deposition environment
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In-line measurement via Band Edge, Blackbody, and Pyrometry, ideal for thin film photovoltaic metrology applications, including in-line production measurement.
In situ modular tool for measurement via individual Emissivity Corrected Pyrometry (ECP), Blackbody, and/or Band Edge Modules, ideal for MOCVD reactors with either high speed or low speed rotation and limited optical access.
In situ tool for measuring the absolute temperature of semiconductor wafers, metals, ceramics, MOCVD carriers, and much more. Can also be used to calibrate pyrometers and other blackbody-like sources.
In Situ tool for creating high resolution, full temperature maps on Veeco K465i and EPIK700 wafer carriers and wafers. Greatly enhances the ability to perform process optimization.
k-Space technical sales engineers are available to answer your questions about incorporating the right metrology solution into your application.
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