k-Space Associates, Inc.

Surface Roughness and Quality

kSA 400

In Situ tool for measurement via real-time analysis of RHEED (Reflection High Energy Electron Diffraction) patterns, for systems equipped with a RHEED electron gun and phosphor screen. Surface quality is determined by analyzing the RHEED streak profile. RHEED guns are typically installed in MBE and PLD reactors, and occasionally in sputter deposition tools.

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kSA BandiT

In Situ measurement via above-gap scatter signal, typically used in MBE, PLD, ALD, sputtering, and e-beam evaporation deposition environments.

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kSA BandiT PV

In-line measurement via above-gap scatter signal, ideal for thin film PV applications, including in-line production measurement.

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In Situ modular tool for measurement, measures surface roughness via analysis of above gap scatter signal (must have Band Edge module), ideal for MOCVD reactors with either high speed or low speed rotation and limited optical access.

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