k-Space Associates, Inc.

Thin-Film Thickness and Deposition Rate

Knowing thin-film thickness and deposition rate is critical for both research and production facilities. k-Space Associates has several metrology tools available for real-time data and process control including kSA 400, kSA ICE, kSA BandiT, kSA MOS, and kSA RateRat Pro. For RHEED analysis, kSA 400 offers industry leading technology and unique features. kSA ICE is a modular tool allowing for other properties to be measured as well in the MOCVD process. kSA BandiT is the right tool if temperature measurements in ranges where a pyrometer can’t measure are also needed. If in situ stress measurements are needed as well, kSA MOS will provide these. A more basic tool for monitoring and process control is kSA RateRat Pro.

RHEED system on a chamber

kSA 400

In situ tool for measurement via real-time analysis of RHEED (Reflection High Energy Electron Diffraction) patterns, for systems equipped with a RHEED electron gun and phosphor screen. RHEED guns are typically installed in MBE and PLD reactors, and occasionally in sputter deposition tools.

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kSA ICE thin-film monitoring tool head

kSA ICE

In situ modular tool for measurement via individual Emissivity Corrected Pyrometry (ECP), MOS, and/or RateRat modules, ideal for MOCVD reactors with high or low speed rotation and limited optical access.

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kSA BandiT for thin-film temperature monitoring

kSA BandiT

In situ tool for measurement via real-time analysis of below gap spectral interference oscillations.

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kSA MOS for thin-film stress measurement

kSA MOS

MOS software option provides in situ measurement via real-time analysis of thin film interference fringes (similar to RateRat technology).

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kSA RateRat for thin-film deposition rate monitoring

kSA RateRat Pro

In situ tool for measurement via real-time analysis of thin film interference oscillations during deposition.

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