Products
kSA RateRat Pro
Real-time Deposition Rate Monitoring and Process Control
The kSA RateRat Pro is a deposition rate monitor and advanced process control system. This non-invasive, in-situ, optically-based product makes thin-film deposition monitoring simple. By combining powerful advanced process control with realtime calculations of deposition rate, layer thickness and optical constants, kSA RateRat Pro makes monitoring even the most complex multi-layered materials easy and precise.
The kSA RateRat Pro detects and analyzes surface reflectance in real-time. Using sophisticated Virtual Interface algorithms originally developed at Sandia National Laboratories, kSA RateRat Pro determines deposition rate, layer thickness, and optical constants with as little as 750 Å of material. It provides real-time data analysis and output for feedback into process control software, and is ideal for input into MOCVD, MBE, sputtering, and evaporation control systems.
After initial calibration with a known reflectivity sample, no further material is required to determine individual layer parameters in real time.
Use our kSA RateRat Pro for a variety of tasks, including:
- real-time deposition-rate and thickness monitoring during sputtering, MBE, or MOCVD growth
- real-time optical constant (n,k) determination
- end-point control of multi-layer process
- real-time single or multi-wafer deposition rate profiling during rotation
We have installed the kSA RateRat Pro on many types of MBE, PVD, and MOCVD reactors and have flexible integration options for most any deposition system.
Materials
thin-films
Options
kSA RateRat Compact with 532 nm Laser
For mounting on 1.33” mini-conflat flange(s) or slit viewports. Typically used on commercial MOVPE reactors.
kSA RateRat System Upgrade to 405 nm Laser
Fully integrated 405 nm laser (replaces 532 nm) for ~30% faster determination of film thickness, deposition rate and optical constants (n,k).
RateRat Single Wafer Recipe Control
User-programmable recipe software module for layer thickness and repetition. Additional Rack mount enclosure (RAT-RACK) is available for applications that require more than eight (8) I/O lines supported by the standard rack.
kSA Mini-RateRat Compact Production System
Production-worthy multi-wafer real-time deposition rate and optical constant monitoring system. Integrated 532 nm laser, photodetector, upgraded control electronics and software. Includes the following production-level capabilities.
10-Meter Single Mode Fiber Patch Cable for 658 nm, FC
Provides 10-meter fiber patch cord instead of the standard 2-meter cord provided.
Plug-In Options
Software I/O Support
Software module provides full input/output board support. Supports full remaining analog input and output channels and digital output channels of standard RateRat Pro data acquisition board. Typical uses include temperature input or triggered acquisition input. Other boards can be added at additional cost.
Deposition Control
Full deposition and shutter control via high-current digital output lines. User-programmable recipe software module for layer thickness and repetition.
Desktop Computer
When kSA systems are ordered with a computer, all the required hardware and software is installed, tested, and calibrated.
8-Channel differential input rack mount enclosure and cable
References
k-Space references are a compilation of published papers that either offer a review of the techniques used by the kSA RateRat Pro, or specifically use the kSA RateRat Pro for work within the paper.
- In Situ Pre-Growth Calibration Using Reflectance as a Control Strategy for MOCVD Fabrication of Device Structures
- William G. Breiland, Hong Q. Hou, Herman C. Chui, and Burrel E. Hammons
- Sandia National Laboratories
- Presented at 9th International Conference on Vapor Growth and Epitaxy/ 10th American Conference on Crystal Growth, Vail Colorado, August 4-9, 1996.
- Published in the Journal of Crystal Growth, 174(1997)564.
- In Situ Reflectance and Virtual Interface Analysis for Compound Semiconductor Process Control
- William G. Breiland, Hong Q. Hou, Burrel E. Hammons, and John F. Klem
- Sandia National Laboratories
- XXVIII SOTAPOCS Symposium, Electrochemical Society, San Diego, CA, May 3-8, 1998
General Documents
- kSA RateRat Pro flyer
- Two-page flyer describing the features of the kSA RateRat Pro
- kSA RateRat Pro Product Spec
- Product Specification for the kSA RateRat Pro
Application Notes
kSA RateRat Pro Application Notes are documents written about a specific component or components of the kSA RateRat Pro deposition monitor and advanced process control system. These documents are designed to explain details of the kSA RateRat Pro capabilities and aid the user in maximizing the utility of the system. k-Space User Manuals are available for download as well by contacting us.
Note that some documents contain proprietary information, and therefore are password protected. At this time, if you are a k-Space customer, please email us to request the document and we will send it to you.
- Laser Reflectance Solution for Older CCS MOCVD Systems (06-01-08)
kSA RateRat Pro for GaN (03-12-07)
White Papers
k-Space white papers are documents that describe a technology or technologies utilized by a k-Space product. White papers may also include calibration procedures, application to various technologies, or comparisons with similar products.
Note that some documents may contain proprietary information, and therefore are password protected. If you are a k-Space customer, please email us requesting a username and password, and we will respond via email with a proper username and password, allowing you access to the document.
- There are no white papers at this time.