- kSA 400
- kSA BandiT
- kSA BandiT PV
- kSA MOS
- kSA MOS Ultra/Thermal Scan
- kSA RateRat Pro
- kSA ICE
In Situ Pre-Growth Calibration Using Reflectance as a Control Strategy for MOCVD Fabrication of Device Structures
William G. Breiland, Hong Q. Hou, Herman C. Chui, and Burrel E. Hammons, Sandia National Laboratories
In Situ Reflectance and Virtual Interface Analysis for Compound Semiconductor Process Control
William G. Breiland, Hong Q. Hou, Burrel E. Hammons, and John F. Klem, Sandia National Laboratories
kSA RateRat Pro
Real-time Deposition Rate Monitoring and Process Control
kSA RateRat Pro is a compact, convenient and easy-to-use optical metrology tool for thin-film characterization. It’s unique capability is to measure, in-situ and in real-time, optical constants (n and k), deposition rate and film thickness.
This tool is in daily use on hundreds of deposition systems around the world, in research labs, processing facilities and industrial production; in fact, just about anywhere where dielectric and semiconductor films and coatings need to be deposited with high precision.
kSA RateRat Pro is compatible with essentially any type of deposition method, including MBE, MOCVD, sputtering, PLD, etc. It uses a laser diode source in specular geometry (usually normal incidence) and all of its components are outside the vacuum chamber, as a bolt-on accessory which can easily be added to an existing viewport.
The real-time capability of kSA RateRat Pro is achieved by means of a proprietary algorithm which continuously updates the optical constants of the film, derived from a least-squares fit to the optical reflectivity curve. In this way the film-grower can have a continuous record of the progress of the film growth during its deposition, including all the critical parameters that are needed to characterize film quality and uniformity.
kSA RateRat Pro has many options to suit the needs of different applications and materials, including different laser wavelengths (UV – Vis – IR) as well as full software integration with all the major process control platforms. Whether your needs are in precision optical coatings, solar cell manufacturing, LED production, organic semiconductors, and many other applications where accurate in-situ, real-time, film monitoring is essential, kSA RateRat Pro has you covered.