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References:

Introduction to RHEED
A.S. Arrot

Ultrathin Magnetic Structures I, Springer-Verlag, 1994, pp. 177-220

» View All References

A Review of the Geometrical Fundamentals of RHEED with Application to Silicon Surfaces
John E. Mahan, Kent M. Geib, G.Y. Robinson, and Robert G. Long

J.V.S.T. A 8, 1990, pp. 3692-3700

» View All References

Reflective High Energy Electron Diffraction (RHEED)- A Unique Tool For In-Situ Growth Monitoring
Oleg Maksimov, Material Research Institute, Pennsylvania State University

Vacuum Technology and Coating, August 2008

» View All References

In Situ Composition Monitoring Using RHEED for SrTiO3 Thin Films Grown by Reactive Coevaporation
Luke S.-J Peng and Brian H. Moeckly

J.V.S.T. A 22, 2004, pp. 2437-2439

» View All References

RHEED Monitoring of Rotating Samples During Large-Area Homogeneous Deposition of Oxides
V. C. Matijasevic, Z. Lu, K. Von Dessonneck, C. Taylor, D. Barlett

MRS Fall Meeting, 1997

» View All References

Growth and magnetic properties of Co x Ni 1-x ultrathin films on Cu(100)
F. O. Schumann, S. Z. Wu, G. J. Mankey, and R. F. Willis

Physical Review B, Vol. 56, no.5, 1997

» View All References

Smoothening of Cu films grown on Si(001)
R. A. Lukaszew, Y. Sheng, C. Uher, and R. Clarke

Appl. Phys. Lett., Vol. 76, no.6, 2000

» View All References

Temperature-Dependent Strain Relaxation and Islanding of Ge/Si(111)
P. W. Deelman, L. J. Schowalter, and T. Thundat

Proc. Materials Research Society Vol. 399 (1996)

» View All References

Structural transition in epitaxial Co-Cr superlattices
W. Vavra, D. Barlett, S. Elagoz, C. Uher, and R. Clarke

Physical Review B Vol. 47, no.9, 1993

» View All References

Resonant RHEED Study of Cu 3Au(111) Surface Order
S. W. Bonham and C. P. Flynn

University of Illinois at Urbana-Champaign

» View All References

Molecular Beam Epitaxial Growth of InAs/AlGaAsSb Deep Quantum Wells on GaAs Substrates
N. Kuze, H. Goto, S. Miya, S. Muramatsu, M. Matsui, I. Shibasaki

Proc. Materials Reearch Society Vol. 3999 (1996)

» View All References

Studies of Exchange Coupling in Fe(001) Whisker/Cr/Fe Structures using BLS and RHEED Techniques
B. Heinrich, M. From, J. F. Cochran, L. X. Liao, Z. Celinski, C. M. Schneider and K. Myrtle

Mat. Res. Soc. Symp. Proc. Vol. 313

» View All References

The Use of RHEED Intensities for the Quantitative Characterization of Surfaces
Y. Ma, S. Lordi and J. A. Eades

Proc. Materials Research Society Vol. 399 (1996)

» View All References

The molecular beam epitaxy growth of InGaAs on GaAs(100) studied by in situ scanning tunneling microscopy and reflection high-energy electron diffraction
C. W. Snyder, D. Berlett, B. G. Orr, P. K. Bhattacharya and J. Singh

J. Vac. Sci. Technol. B 9 (4), Jul/Aug 1991

» View All References

Morphology Transition and Layer-by-Layer Growth of Rh(111)
F. Tsui, J. Wellman, C. Uher, and Roy Clarke

Physical Review Letters, Vol. 76, no. 17, 1996

» View All References

CCD-Based RHEED Detection and Analysis System
D. Barlett, C.W. Snyder, B.G. Orr, and Roy Clarke

Rev. Sci. Instrum. 62, 1991, pp. 1263-1269

» View All References

kSA 400

Exploit the Power of RHEED!

The kSA 400 puts the power of Reflection High-Energy Electron Diffraction (RHEED) at your fingertips. Whether analyzing a static diffraction pattern, or acquiring data during high-speed substrate rotation, the kSA 400 helps you exploit the valuable wealth of information contained within the RHEED pattern. The kSA 400 combines a high-resolution, high-speed, and high-sensitivity CCD camera with sophisticated RHEED-specific acquisition and analysis software.  This flexible system enables the analysis of virtually any image feature and, with one of many additional options, controls the electron gun for such tasks as acquiring RHEED rocking curves.

Easy to use and straightforward to install, the kSA 400 is designed for convenience and gives quantitative results right out of the box. Seamless integration between hardware and software as well as visually-driven analysis makes user operation straightforward and simple. Extensive customer input has helped us make the kSA 400 the industry’s most powerful analytical RHEED system and an integral part of MBE, PLD, PVD, and surface science chambers worldwide. Now in its fifth generation, the goal of the kSA 400 is to provide you with the most information from your RHEED pattern. See the kSA 400 in action.

Capabilities

Growth Rate

IDL TIFF file

Probably the most common use of RHEED is for determining growth rate via RHEED intensity oscillations, a phenomena that occurs during layer-by-layer epitaxial growth. The kSA 400 determines growth rate via three complimentary methods: Fourier-transform, extrema count (derivative analysis), and damped sine wave fitting. These three techniques determine growth rate independently,  resulting in very accurate and consistent measurement of your thin-film growth rate.

Watch the kSA 400 monitor RHEED oscillations.

 

Lattice Spacing/Strain

kSA400-lattice-spacing-strain

Another powerful use for RHEED is to determine the absolute atomic spacing, or lattice spacing, between atoms on a surface.  The kSA 400 makes measuring absolute lattice spacing simple.  Furthermore, if you’d like to measure the evolution of lattice spacing, or the strain of lattice mismatched growth, the kSA 400 makes this easy too. By monitoring the spacing between diffraction streaks using sophisticated, proven analysis algorithms, strain evolution  with very high accuracy and resolution is at your fingertips with the kSA 400.

Structural Analysis

Structural Analysis Image kSA400

The kSA 400 makes analyzing surface structure easy.  By acquiring
RHEED images along the major crystal directions of the surface, measuring the pixel spacing and calculating a ratio, surface crystal structure can easily be determined. The kSA 400 also makes acquiring and archiving RHEED patterns a snap.  The kSA 400 software contains a comprehensive RHEED Image Library (RIL) for reference and further analysis.

kSA 400 Plug-Ins

The kSA 400 supports several plug-in options to give you even more analytical capability. These plug ins include:

These options can be added to a standard kSA 400 system at any time, and typically include a software plug-in and hardware additions. One of our most popular plug-in options is RHEED Electron Gun Control, which allows you to control all the settings of your RHEED gun through the kSA 400 software.  The kSA 400 software also allows you to acquire RHEED images while varying gun control parameters e.g. beam rocking acquisition which is supported on Staib
beam rocking electron guns.

What You Get With a kSA 400 System

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