


Products
k-Space Products
Advanced tools for in-situ thin film characterization
k-Space Associates is a leading manufacturer of in-situ thin-film and wafer characterization technologies to monitor and control MBE, CVD, PLD, PVD, sputtering and evaporation systems. Our product line utilizes optical imaging technology for determining thin-film stress, strain, wafer curvature, deposition rate, layer thickness, semiconductor wafer temperature, RHEED and LEED analysis and advanced process control.
All kSA scientific imaging products focus on real-time data acquisition, processing, and analysis.
Accurate and precise in-situ process monitoring facilitates a clear understanding of the deposition process as well as increases yields in the production environment. Contact us today so we can discuss your thin-film monitoring needs.
| kSA 400 | kSA MOS | kSA MOS Ultra-Scan Thermal-Scan | kSA RateRat Pro | kSA BandiT | |
|---|---|---|---|---|---|
| MOCVD | |||||
| CVD | |||||
| MBE | |||||
| Sputtering | with high-pressure RHEED system | ||||
| PLD | with high-pressure RHEED system | ||||
| Annealing | Thermal-Scan with Integrated Heater |
