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Products

Advanced tools for in-situ thin film characterization

k-Space is a leading manufacturer of in-situ, in-line, and ex-situ metrology tools for the semiconductor, thin-film, and PV industries. Our tools are used for monitoring nearly all thin-film deposition processes, including MBE, MOCVD, PLD, PVD, sputtering, and evaporation. Our products utilize optical imaging technology for non-contact, non-invasive measurement of a plethora of important parameters:

wafer and film temperature
thin-film stress and strain
wafer curvature, bow, and tilt
surface roughness and surface quality
deposition rate
film thickness
absolute lattice spacing
optical band gap

Accurate and precise process monitoring facilitates a clear understanding of the deposition process, ultimately resulting in increased yields and efficiencies. What do you want to measure today? Please go to our Applications page to get started, or sort through our line of metrology tools listed at the left. Or feel free to contact us – we look forward to hearing from you!