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k-Space Products

Advanced tools for in-situ thin film characterization

k-Space Associates is a leading manufacturer of in-situ thin-film and wafer characterization technologies to monitor and control MBE, CVD, PLD, PVD, sputtering and evaporation systems. Our product line utilizes optical imaging technology for determining thin-film stress, strain, wafer curvature, deposition rate, layer thickness, semiconductor wafer temperature, RHEED and LEED analysis and advanced process control.

All kSA scientific imaging products focus on real-time data acquisition, processing, and analysis.

Accurate and precise in-situ process monitoring facilitates a clear understanding of the deposition process as well as increases yields in the production environment. Contact us today so we can discuss your thin-film monitoring needs.

 kSA 400kSA MOS

kSA MOS
Ultra-Scan
Thermal-Scan

kSA RateRat
Pro
kSA BandiT
RHEED and Surface Analysis          
In-situ Stress/Strain/
Curvature/Bow
         
Ex-situ Stress/Strain/
Curvature/Bow
         
Growth Rate and Thickness          
Temperature of Wafer and/or Film          
Customize          
 kSA 400kSA MOSkSA MOS
Ultra-Scan
Thermal-Scan
kSA RateRat
Pro
kSA BandiT
MOCVD          
CVD          
MBE          
Sputtering with high-pressure RHEED system        
PLD with high-pressure RHEED system        
Annealing     Thermal-Scan with Integrated Heater