The Compound Semiconductor article, MOCVD Carrier Emissivity – A New Approach, discusses the importance of MOCVD wafer carrier characterization. The article focuses on the determination of emissivity uniformity across the wafer carrier as well as micro crack identification to minimize temperature variations and carbon outgassing from the carriers. It features k-Space Associates’ latest product offering, the kSA Emissometer, which was developed to address these needs.
Compound Semiconductor Article: MOCVD Carrier Emissivity – A New Approach
