k-Space Associates, Inc.

Wafer and Film Temperature

kSA BandiT

In situ measurement via Band Edge, Blackbody, and Pyrometry, typically used in MBE, PLD, ALD, sputtering, and e-beam evaporation deposition environment

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kSA BandiT PV

In-line measurement via Band Edge, Blackbody, and Pyrometry, ideal for thin film photovoltaic metrology applications, including in-line production measurement.

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kSA ICE

In situ modular tool for measurement via individual Emissivity Corrected Pyrometry (ECP), Blackbody, and/or Band Edge Modules, ideal for MOCVD reactors with either high speed or low speed rotation and limited optical access.

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kSA SpectraTemp

In situ tool for measuring the absolute temperature of semiconductor wafers, metals, ceramics, MOCVD carriers, and much more.  Can also be used to calibrate pyrometers and other blackbody-like sources.

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kSA Scanning Pyro

In Situ tool for creating high resolution, full temperature maps on Veeco K465i and EPIK700 wafer carriers and wafers.  Greatly enhances the ability to perform process optimization.

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