k-Space Associates, Inc.

Thin-Film Thickness and Deposition Rate

kSA 400

In situ tool for measurement via real-time analysis of RHEED (Reflection High Energy Electron Diffraction) patterns, for systems equipped with a RHEED electron gun and phosphor screen. RHEED guns are typically installed in MBE and PLD reactors, and occasionally in sputter deposition tools.

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kSA RateRat Pro

In situ tool for measurement via real-time analysis of thin film interference oscillations during deposition.

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kSA BandiT

In situ tool for measurement via real-time analysis of below gap spectral interference oscillations.

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kSA MOS

MOS software option provides in situ measurement via real-time analysis of thin film interference fringes (similar to RateRat technology).

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kSA ICE

In situ modular tool for measurement via individual Emissivity Corrected Pyrometry (ECP), MOS, and/or RateRat modules, ideal for MOCVD reactors with high or low speed rotation and limited optical access.

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