k-Space is now offering an Emissivity Corrected Pyrometry (ECP) module for its kSA ICE product line. The ECP module can be added to new or existing ICE systems. For applications where using band edge thermometry is not applicable (e.g. small band gap or heavily doped substrates), pyrometry is often used. However, pyrometry measurements during film growth are often compromised by thin film interference that affects the measured radiation signal. By directly measuring the reflectance of the sample, the changes in surface emissivity can be compensated for, and a more reliable temperature (ECP temperature) is determined. This functionality is particularly useful for GaN on Si growth, and complements the existing temperature measurement tools offered by k-Space. For more details please see our most recent ICE Product Specification and our new ECP Technology Overview Note
The kSA ICE system modular design allows customers to independently select the metrology tools that meet their research needs. kSA ICE can be configured with various standard modules:
- ECP (Emissivity Corrected Pyrometry)
- BE (Band Edge thermometry)
- BB (Blackbody calibration and real-time analysis)
- MOS (Multi-beam Optical Sensor sample curvature/stress/bow)
- R (Reflectivity measurement for growth rate and optical constant determination)
