emissometerProductPhotok-Space Associates, Inc., leader in thin-film characterization products, is pleased to introduce its newest product, the kSA Emissometer. This ex situ tool provides MOCVD fabs with essential wafer carrier characterization, including emissivity uniformity and defect identification.

Traditionally MOCVD fabs rely on subjective human tests to inspect the quality of wafer carriers after bakes and between runs. They rely on empirical data to adjust carrier temperatures from growth to growth. The kSA Emissometer puts the science back in carrier evaluation with high resolution carrier emissivity mapping and the detection of defects and microcracks that aren’t visible to the human eye. This tool is designed to be used by operators and engineers and provides full quantitative carrier maps in 10 minutes.

“The real advantage of the kSA Emissometer is that it provides fabs with systematic carrier data that can be integrated into their quality control processes. It also provides a go-no-go decision on carrier use and quantitative determination of the carrier emissivity, allowing for temperature set-point adjustments for individual carriers. In the end, this will lead to lower production costs and better device yields,” commented k-Space CEO Darryl Barlett.

 

About k-Space Associates, Inc.

k-Space Associates, Inc. (www.k-space.com/) is a leading metrology supplier of advanced instrumentation and software for the surface science and thin-film technology industries. Founded in 1992, its systems are used for monitoring wafer temperature, thin-film stress, deposition rate, thickness, material absorption properties, and Reflection High Energy Electron Diffraction (RHEED). Backed by a commitment to ongoing support, these solutions are currently used worldwide in research and production line monitoring of compound semiconductor-based electronic, optoelectronic, and photovoltaic devices. Extensive input and close collaboration with its worldwide customer base has led to the development of today’s most powerful thin film characterization products.

Thin Film and Industrial Metrology Systems

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