Denton Vacuum Partners with k-Space to Expand Capability

Moorestown, NJ, July 15, 2014—Denton Vacuum LLC, a leading manufacturer of thin film technology products, has teamed with k-Space Associates, Inc., a leading manufacturer of in situ, in-line, and ex situ metrology tools for the semiconductor, thin-film, and photovoltaic (PV) industries. As part of that partnership, Denton installed a kSA Multi-beam Optical Sensor (MOS)—a high resolution, in situ curvature and stress monitor—in an Explorer 14 sputtering tool in Denton’s Customer Application Development Center (CADC).