k-Space Associates, Inc.

Applications

kSA products measure important parameters such as temperature, deposition rate, film thickness, stress, curvature, bow, reflectivity, surface roughness, and many other material properties. These are measured in real-time by utilizing probes such as lasers, white light, UV light sources, and electron beams to investigate thin-films and substrates at an atomic level.  Our thin-film analysis tools are used to extract real-time information from today’s most advanced deposition and processing applications within compound semiconductor, silicon semiconductor and photovoltaic advanced thin film production and R&D.

Sophisticated software analysis and reporting capabilities provide information to better understand tomorrow’s electronic and optoelectronic devices or to provide online control during mass production to enhance yield. Tailored optics and fully integrated solutions have been designed for simple mounting and non-invasive monitoring of advanced deposition processes such as:

Your ApplicationWhat You Want to MeasureTool
MBEGrowth RatekSA 400, kSA BandiT, kSA RateRat Pro
TemperaturekSA BandiT, kSA ICE, kSA SpectraTemp
Curvature, StresskSA MOS
Analytical RHEEDkSA 400
SputteringAnalytical RHEEDkSA 400
Curvature, StresskSA MOS
TemperaturekSA BandiT, kSA ICE, kSA SpectraTemp
PLDGrowth RatekSA 400, kSA BandiT, kSA RateRat Pro
Curvature, StresskSA MOS
TemperaturekSA BandiT, kSA SpectraTemp
E-beam EvaporationAnalytical RHEEDkSA 400
Growth RatekSA 400, kSA BandiT, kSA RateRat Pro
Curvature, StresskSA 400, kSA BandiT, kSA RateRat Pro
TemperaturekSA BandiT, kSA ICE, kSA SpectraTemp
MOCVDTemperaturekSA ICE, kSA SpectraTemp, kSA Scanning Pyro
StresskSA ICE
ReflectivitykSA ICE
Film thickness, growth ratekSA ICE
Ex Situ CharacterizationCurvature, Stress MapskSA MOS UltraScan, kSA MOS ThermalScan
Bow Height, Film Thickness MapskSA MOS UltraScan, kSA MOS ThermalScan
Thermal Expansion Coefficient kSA MOS ThermalScan
MOCVD Carrier Emissivity Maps
kSA Emissometer
MOCVD Carrier Reflectance Maps
kSA Emissometer
MOCVD Carrier Surface Defects
kSA Emissometer
MOCVD Carrier Microcracks
kSA Emissometer