k-Space products utilize real-time probes, including lasers, white light, UV light source, and electron beams to investigate thin-films and substrates at an atomic level. Our tools are used to extract real-time information from today’s most advanced deposition and processing applications within compound semiconductor, silicon semiconductor and photovoltaic advanced thin film production and R&D. Sophisticated software analysis and reporting capabilities provide information to better understand tomorrow’s electronic and optoelectronic devices or to provide online control during mass production to enhance yield. Tailored optics and fully integrated solutions have been designed for simple mounting and non-invasive monitoring of advanced deposition processes such as:
- MOCVD (Metal Organic Chemical Vapor Deposition)
- MBE (Molecular Beam Epitaxy)
- Thermal and E-beam Evaporation
- PLD (Pulsed Laser Deposition)
kSA products measure important parameters such as temperature, deposition rate, film thickness, stress, curvature, bow, reflectivity, surface roughness, and many other material properties in real-time.
kSA offers per-sample testing and analysis services using our most advanced optical metrology tools.
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