Measure wafer and/or thin-film temperature via band gap thermometry: it's non-contact, non-invasive, and real-time. Insensitive to changing view port transmission, stray light sources, and signal contribution from substrate heaters, measure GaAs, Si, SiC, InP, ZnSe, ZnTe, and GaN.

With the kSA Temperature Solution, get:

• substrate temperature during epitaxial growth
• temperature profile mapping
• single or multi-wafer temperature profiling during epitaxial growth
• temperature monitoring during thermal anneal
• temperature monitoring during plasma process
• in-situ growth rate calibration

kSA BandiT