kSA Products by Solution

Home > Products... by Solution

New product offering: kSA MOS Thermal-Scan

Products... by Solution


		kSA 400		kSA MOS		kSA MOS Ultra-Scan		kSA RateRat Pro		kSA BandiT
	Solutions for...
	RHEED and Surface Analysis	√

	In-situ Stress/Strain/ Curvature/Bow	√		√

	Ex-situ Stress/Strain/ Curvature/Bow			√		√

	Growth Rate and Thickness	√		√				√		√

	Temperature of wafer and/or film									√

	Customize	√		√		√		√		√

	Materials	single crystal, polycrystalline		reflective		reflective		at least two materials with different index of refraction		GaAs, Si, SiC, InP, ZnSe, ZnTe, and GaN

	Options	multi-wafer, plug-ins, rotational triggering		growth rate and optical constants, multi-wafer, Japanese version, rotational triggering		300mm substrates, 1000°C heating stage, Japanese version, rotational triggering		multi-wafer, plug-ins, rotational triggering		multi-wafer, rotational triggering, wafer mapping

Accessories


		Screens RMAT Pulse Control downloadable upgrade		RMAT Pulse Control		RMAT		RMAT Pulse Control		RMAT Pulse Control