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Product Inquiry
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This page contains all the product information for the kSA RateRat Pro. If you are looking for kSA RateRat Pro support, please click here.
General Information
Plug-In Options
Application Notes
White Papers
References
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General Information
- kSA RateRat Pro flyer
- Two-page flyer describing the features of the kSA RateRat Pro
- kSA RateRat Pro specifications
- Four-page document describing hardware/software specifications in detail
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Plug-In Options
- Software I/O Support
- Software module provides full input/output board support. Supports full remaining analog input and output channels and digital output channels of standard RateRat Pro data acquisition board. Typical uses include temperature input or triggered acquisition input. Other boards can be added at additional cost.
- Deposition Control
- Full deposition and shutter control via high-current digital output lines. User-programmable recipe software module for layer thickness and repetition.
- Dell™ Desktop Computer
- When kSA systems are ordered with a computer, all the required hardware and software is installed, tested, and calibrated.
- 10-Meter Single Mode Fiber Patch Cable for 658 nm, FC
- Provides 10-meter fiber patch cord instead of the standard 2-meter cord provided.
- 8-Channel differential input rack mount enclosure and cable
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Application Notes
kSA RateRat Pro Application Notes are documents written about a specific component or components of the kSA RateRat Pro deposition monitor and advanced process control system. These documents are designed to explain details of the kSA RateRat Pro capabilities and aid the user in maximizing the utility of the system. k-Space User Manuals are available for download as well by contacting us.
Note that some documents contain proprietary information, and therefore are password protected. At this time, if you are a k-Space customer, please email us to request the document and we will send it to you.
- kSA RateRat Pro for GaN
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White Papers
k-Space white papers are documents that describe a technology or technologies utilized by a k-Space product. White papers may also include calibration procedures, application to various technologies, or comparisons with similar products.
Note that some documents may contain proprietary information, and therefore are password protected. If you are a k-Space customer, please email us requesting a username and password, and we will respond via email with a proper username and password, allowing you access to the document.
- There are no white papers at this time.
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References
k-Space references are a compilation of published papers that either offer a review of the techniques used by the kSA RateRat Pro, or specifically use the kSA RateRat Pro for work within the paper.
- In Situ Pre-Growth Calibration Using Reflectance as a Control Strategy for MOCVD Fabrication of Device Structures
- William G. Breiland, Hong Q. Hou, Herman C. Chui, and Burrel E. Hammons
- Sandia National Laboratories
- Presented at 9th International Conference on Vapor Growth and Epitaxy/ 10th American Conference on Crystal Growth, Vail Colorado, August 4-9, 1996.
- Published in the Journal of Crystal Growth, 174(1997)564.
- In Situ Reflectance and Virtual Interface Analysis for Compound Semiconductor Process Control
- William G. Breiland, Hong Q. Hou, Burrel E. Hammons, and John F. Klem
- Sandia National Laboratories
- XXVIII SOTAPOCS Symposium, Electrochemical Society, San Diego, CA, May 3-8, 1998
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