Make even the most complex thin-film deposition process easy and precise using the kSA RateRat Pro, a non-invasive, in-situ, and optically-based deposition rate monitor.

With "Virtual Interface" algorithms originally developed at Sandia National Laboratories, use RateRat Pro to determine deposition rate, layer thickness, and optical constants with as little as 350Å of material.

Please download the kSA RateRat Pro datasheet or kSA RateRat Pro specifications for more information and options.

Use your kSA RateRat Pro for a variety of tasks, including:

• real-time deposition-rate monitoring during sputtering, MBE, or MOCVD growth
• real-time optical-constant determination
• end-point control of multi-layer process
• real-time single or multi-wafer deposition rate profiling

We have installed the kSA RateRat Pro on many types of MBE and MOCVD reactors, including Aixtron's 200/G2/G3 and Veeco's Gen III. Our customers include industry leaders, national laboratories, and universities.

Please contact us to discuss your thin-film characterization needs, including growth rate and thickness for materials with two different indexes of refraction.