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This page contains all the product information for the kSA 400. If you are looking for kSA 400 support, please click here.

     General Information

     Plug-In Options

     Flange Mounts

     Application Notes

     White Papers

     References

General Information

What you need for RHEED

Along with the kSA 400, this document describes what else you need to do RHEED
 

kSA 400 flyer

Two-page flyer describing the features of the kSA 400
 

kSA 400 specifications

Twelve-page document describing hardware/software specifications in detail

Plug-In Options

With the kSA 400, you can analyze RHEED oscillations, perform reconstruction evolution analysis, diffraction pattern analysis, acquire from multiple azimuths, and measure growth rate, lattice spacing/strain, and surface coherence / structure / reconstruction. These plug-in options add to the capability of the kSA 400 analytical RHEED software.

LEED (Low-Energy Electron Diffraction)

The kSA 400 is ideal for LEED imaging. The LEED IV plug-in automatically tracks the evolution of the Low Energy Electron Diffraction pattern to obtain Intensity versus Voltage accelerating. In addition, acquire a movie of the entire acquisition for later playback and analysis.
 

Phase-Locked Epitaxy

The kSA 400 PLE plug-in option automatically controls layer-by-layer growth by using real-time monitoring of RHEED oscillations to automate shutter open and close times. This yields atomic-level accuracy and reproducible results for thin films.
 

Auger/X-Ray Photoemission Spectroscopy

The kSA 400 Auger/XPS Photoemission Spectroscopy plug-in option gives you an inexpensive and easy way to acquire Auger Electron Spectroscopy (AES) and X-ray Photoemission Spectroscopy (XPS) data via the kSA 400 system. AES and XPS are both powerful techniques for surface analysis, relying on material-specific photoelectron energy signatures from either electron (AES) or X-ray (XPS) induced photoelectron emission.
 

Electron Gun Control / Beam Rocking

The kSA 400 Electron Gun Control plug-in option allows for full control of electron guns. Store gun control settings and immediately ramp to them, fine tuning while simultaneously viewing the diffraction pattern and acquiring Reflection High Energy Electron Diffraction (RHEED) rocking curves--all with the click of the mouse.
 

Rotation Monitoring and Triggering

The Rotation Monitoring and Triggering (RMAT) product was developed by k-Space to meet the needs of scientists and engineers who desire an accurate, programmable trigger source coupled to a rotation stage during thin-film deposition. With the RMAT, the user can program precise trigger positions during rotation, and use these triggers to initiate external events such as the acquisition of analytical images at specific rotation angles.

Flange Mounts

k-Space provides a multitude of flange mounting assemblies for a variety of vacuum chambers and flanges, concealing and protecting imager and optics, and providing a light-tight environment.

(Note: 3-D models linked below require Windows® Internet Explorer® and installing eDrawings® when prompted.)

• Standard 4.5" ( 3-D model , 2-D pdf ), 6" ( 3-D model , 2-D pdf ) , or 8" ( 3-D model , 2-D pdf )


• 6" Riber 32 ( 3-D model , 2-D pdf )


• 8" Mod-GenII ( 3-D model , 2-D pdf )


• open style with fabric cover

Application Notes

kSA 400 Application Notes are documents written about a specific component or components of the kSA 400 analytical RHEED system. These documents are designed to explain details of the kSA 400 capabilities and aid the user in maximizing the utility of the system. k-Space User Manuals are available for download as well by contacting us.

Note that some documents contain proprietary information, and therefore are password protected. If you are a k-Space customer, please email us requesting a username and password, and we will respond via email with a proper username and password, allowing you access to the document.

At this time, there are no application notes.

White Papers

k-Space white papers are documents that describe a technology or technologies utilized by a k-Space product. White papers may also include calibration procedures, application to various technologies, or comparisons with similar products.

Note that some documents may contain proprietary information, and therefore are password protected. If you are a k-Space customer, please email us requesting a username and password, and we will respond via email with a proper username and password, allowing you access to the document.

Growth Rate Methods (1-21-05)

The kSA 400 has three independent methods for calculating growth rate from RHEED intensity oscillations. This document describes in detail these methods and how to use them within the kSA 400 software.
 

The Discovery (09-01-01)

Motorola Labs solves a 30-year semiconductor industry puzzle.
 

Image Processing Speeds Wafer Analysis (02-01-02)

By integrating available hardware and software, an imaging system can examine semiconductor-wafer-material deposition at high speed. Vision Systems Design, February 2002

References

k-Space references are a compilation of published papers that either offer a review of the techniques used by the kSA 400, or specifically use the kSA 400 for work within the paper.

Reviews on RHEED

Introduction to RHEED

A.S. Arrot

Ultrathin Magnetic Structures I, Springer-Verlag, 1994, pp. 177-220
 

A Review of the Geometrical Fundamentals of RHEED with Application to Silicon Surfaces

John E. Mahan, Kent M. Geib, G.Y. Robinson, and Robert G. Long

J.V.S.T. A 8, 1990, pp. 3692-3700

kSA 400 References

In Situ Composition Monitoring Using RHEED for SrTiO3 Thin Films Grown by Reactive Coevaporation

Luke S.-J Peng and Brian H. Moeckly, J.V.S.T. A 22, 2004, pp. 2437-2439
 

RHEED Monitoring of Rotating Samples During Large-Area Homogeneous Deposition of Oxides

V. C. Matijasevic, Z. Lu, K. Von Dessonneck, C. Taylor, D. Barlett

MRS Fall Meeting, 1997
 

Growth and magnetic properties of Co x Ni 1-x ultrathin films on Cu(100)

F. O. Schumann, S. Z. Wu, G. J. Mankey, and R. F. Willis

Physical Review B, Vol. 56, no.5, 1997
 

Smoothening of Cu films grown on Si(001)

R. A. Lukaszew, Y. Sheng, C. Uher, and R. Clarke

Appl. Phys. Lett., Vol. 76, no.6, 2000
 

Temperature-Dependent Strain Relaxation and Islanding of Ge/Si(111)

P. W. Deelman, L. J. Schowalter, and T. Thundat

Proc. Materials Research Society Vol. 399 (1996)
 

Structural transition in epitaxial Co-Cr superlattices

W. Vavra, D. Barlett, S. Elagoz, C. Uher, and R. Clarke

Physical Review B Vol. 47, no.9, 1993
 

Resonant RHEED Study of Cu 3Au(111) Surface Order

S. W. Bonham and C. P. Flynn

University of Illinois at Urbana-Champaign
 

Molecular Beam Epitaxial Growth of InAs/AlGaAsSb Deep Quantum Wells on GaAs Substrates

N. Kuze, H. Goto, S. Miya, S. Muramatsu, M. Matsui, I. Shibasaki

Proc. Materials Reearch Society Vol. 3999 (1996)
 

Studies of Exchange Coupling in Fe(001) Whisker/Cr/Fe Structures using BLS and RHEED Techniques

B. Heinrich, M. From, J. F. Cochran, L. X. Liao, Z. Celinski, C. M. Schneider and K. Myrtle

Mat. Res. Soc. Symp. Proc. Vol. 313
 

The Use of RHEED Intensities for the Quantitative Characterization of Surfaces

Y. Ma, S. Lordi and J. A. Eades

Proc. Materials Research Society Vol. 399 (1996)
 

The molecular beam epitaxy growth of InGaAs on GaAs(100) studied by in situ scanning tunneling microscopy and reflection high-energy electron diffraction

C. W. Snyder, D. Berlett, B. G. Orr, P. K. Bhattacharya and J. Singh

J. Vac. Sci. Technol. B 9 (4), Jul/Aug 1991
 

Morphology Transition and Layer-by-Layer Growth of Rh(111)

F. Tsui, J. Wellman, C. Uher, and Roy Clarke

Physical Review Letters, Vol. 76, no. 17, 1996
 

CCD-Based RHEED Detection and Analysis System

D. Barlett, C.W. Snyder, B.G. Orr, and Roy Clarke

Rev. Sci. Instrum. 62, 1991, pp. 1263-1269