 k-Space references are a compilation of published papers that either offer a review of the techniques used by the kSA RateRat Pro, or specifically use the kSA RateRat Pro for work within the paper.
1. In Situ Pre-Growth Calibration Using Reflectance as a Control Strategy for MOCVD Fabrication of Device Structures
William G. Breiland, Hong Q. Hou, Herman C. Chui, and Burrel E. Hammons
Sandia National Laboratories, Albuquerque, NM 87185-0601
Presented at 9th International Conference on Vapor Growth and Epitaxy/ 10th American Conference on Crystal Growth, Vail Colorado, August 4-9, 1996. Published in the Journal of Crystal Growth, 174(1997)564.
2. In Situ Reflectance and Virtual Interface Analysis for Compound Semiconductor Process Control
William G. Breiland, Hong Q. Hou, Burrel E. Hammons, and John F. Klem
Sandia National Laboratories, Albuquerque, NM 87185-0601
XXVIII SOTAPOCS Symposium, Electrochemical Society, San Diego, CA, May 3-8, 1998
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