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kSA RateRat Pro - Deposition Monitoring |
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| Software - Specifications: Process Control |
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| This option is designed to facilitate interfacing RateRat Pro with process control systems, and allows you to build a recipe to control multiple processes. You can control your deposition or etching processes with input and output triggers using a variety of target parameters such as thickness, reflectivity or duration. Multiple processes can be configured, and cycling can be enabled, to create repeated layers.
Each process can be selected for modification in the recipe window, and cycling can be configured to create recipes where processes are repeated. |
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| Recipe menu for configuring multiple processes. |
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| When a process is selected, a process window is opened (see right). In this window, each process can be configured individually. Fitting can be optimized with estimates of optical constants and other parameters. Input and output triggers can be set up to control the process. RateRat Pro can be configured to wait for a trigger to start a process, or output a trigger to end a process, when the target thickness, target reflectivity, or target time is reached. |
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| Process configuration dialog. |
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| The input/output board options window (see right) allows data acquisition board channels to be mapped to a voltage range. This allows for the board to be configured to match the input or output device that RateRat Pro is communicating with for process control. |
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| Input /output board options dialog. |
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