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kSA RateRat Pro - Deposition Monitoring
Hardware - Specifications    

All RateRat Pro systems include the following hardware:

Schematic illustration of the RateRat Pro system

Data Acquisition Board

  • 16 channels of 16-bit A/D resolution
  • User-selectable DC or modulated detection up to 160kHz
  • Dual 12-bit D/As
  • 3 counters, 32 Digital I/O lines
  • 1k sample FIFO memory
  • Burst-mode SS&H emulation
  • PCI computer interface

High Speed Photodetector

  • Amplified silicon detector
  • Switchable gain: 4 position 10dB increments
  • Broadband noise: 0.3mV RMS (measured 0-10V full scale)
  • Active area: 100mm 2
  • Output Voltage: 0-10V
  • Responsivity: uniformity less than 1% over entire active area
  • Selection of lens cell receivers available

Laser

  • Fiber-couple laser diode
  • Temperature-stabilized
  • 258nm nominal wavelength (other wavelengths available on request)
  • 15mW nominal max output power, measured directly at laser output; software controllable
  • Gaussian output beam geometry with integrated collimating lens cell, 1.6mm 1/e 2 beam diameter
  • Operates in constant current output mode
  • Software controlled modulation DC to 100kHz

Power Supply

  • 90-250Vac universal input for worldwide use
  • High efficiency 70W continuous or 80W peak power
  • Lifetime 250,000 hours of use
  • Supplies both 5V and 12V

Cabling

  • Laser control cable, photodetector cable, 20 ft. standard length
  • Single-mode fiber patch cable, 658nm, FC termination, standard 2m length (10m length optional)
  • 6 ft Power Cable
  • Custom lengths and cables available

Minimum System Requirements (Dell Desktop Computer available as option)

  • Processor: Pentium IV
  • Speed: 3.4GHz
  • Memory: 256 Mbytes
  • Video: 1024 x 768. 16-bit depth
  • Hard Disk: 20Gbytes
  • Bus: one PCI expansion slot and one available L-Bracket position
  • OS: WindowsTM 2000 or WindowsTM XP ONLY

Viewport Mounts

RateRat Pro systems include your choice of black anodized aluminum flange mounts (for mounting and concealing the detector, laser and optics). All options feature removable lids with press-fit knobs, steerable laser beams, and a detector on an optical rail for ease of alignment. Standard flange o.d.’s available: 2.75”, 4.5”, 6”, 8” and mini-conflats (1.33”). If you don’t find a standard mount that will meet your needs, our engineers are happy to custom design one that will work for you.


  • Mini RateRat - External Laser With Fiber
Our small normal incidence mount for chambers with mini-conflat or similiar optical access ports. Perfect for MOCVD reactors. Features include a focusing lens for handling variation in reflection angle due to substrate wobble and a tilt stage for easy aligment.
Mini-RateRat – External Laser with Fiber

  • Standard Single-Port - External Laser With Fiber
Our single-port mount for chambers where space is tight. Features a steerable laser with x-y tilt, adjustable height and translation along an optic rail. Detector is mounted for rotation, adjustable height and translation along an optic rail. Laser is easily removable for use in other applications.
Standard Single Port Mount - External Laser with Fiber
Standard Single Port Mount – External Laser with Fiber

  • Standard Two-Port Mount - External Laser With Fiber
Offers the same features as our standard single-port housing in a two-port configuration. Note the ports to be used must be in a specular geometry.
Standard 2-Port Mount - External Laser with Fiber

Standard 2-Port Mount - External Laser with Fiber
Standard 2-Port Mount – External Laser with Fiber

  • Standard Right-Angle Mount – External Laser With Fiber
Same features as our standard single-port housing but mounts at 90 degrees to the flange. This housing uses a kinematic mirror mount with a 2” diameter mirror to steer the laser beam into and out of the viewport.
Standard Right Angle Mount - External Laser with Fiber
Standard Right Angle Mount – External Laser with Fiber

  • Single-Port Mount – Internal Laser With Fiber
Single Port Mount - Internal Laser with Fiber
This housing contains the laser unit as well as the fiber and detector. The advantage of this design is a more stable beam as the fiber is internal to the assembly and, hence, cannot be moved. Therefore, variation in signal intensity due to fiber movement is eliminated. The laser is easily removable for use in other applications. A spherical steering mirror makes this configuration ideal for systems with wobble due to sample rotation.
Single Port Mount – Internal Laser with Fiber

  • Single-Port Mount – Internal Laser Without Fiber
This housing contains a direct output laser which maximizes laser output intensity because there is no loss from coupling to a fiber. The laser beam is easily steered through the viewport with a ½” mirror mounted in a kinematic mount, which offers adjustable height rotation and translation along an optic rail. The returning beam is then steered into the detector with a 1” spherical mirror, also mounted in a similar manner. The spherical steering mirror makes this system ideal for chambers with wobble from rotation.
Single Port Mount - Internal Laser without Fiber
Single Port Mount – Internal Laser without Fiber

  • Rack Mount For Standard 19” Rack
19
Black anodized aluminum rack mount for standard 19” rack houses the power supply, I/O interface, and optional laser. Features include analog and digital input/output, interlock key for laser safety and on/off power switch.
19” Rack Mount Control Unit