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kSA RateRat Pro - Deposition Monitoring |
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| Software - Specifications: Acquisition Modes |
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 Calibration Mode
RateRat Pro relies on accurate calibration of the system to monitor absolute reflectivity. This can be easily accomplished by entering the reflectivity of your known sample and running calibration mode. The RateRat Pro software will automatically calculate a scale factor using the following equation:
(Max Amplitude FFT) * Scale Factor = Known Substrate Reflectivity Value
Once calibrated, the detected signal will automatically be converted to the correct absolute reflectivity.
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Single Layer Acquire Mode
Takes reflectivity data and performs real-time fitting to determine deposition rate (G), thickness (t), and the optical constants (n, k) of the current layer. The reflectivity fit will typically converge after 400 to 700 Å of material, depending upon the amplitude of oscillations and the quality of the film surface. The real-time reflectivity chart shows the reflectivity input data (red), the fit to the reflectivity data (green), and the fitting parameters n, k, s, G and T, plus their approximate error. This chart is stored in a .kdt file, which is a binary file containing all the data taken during the acquisition. |
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Screen shot of single layer acquisition mode, showing real-time reflectivity fitting and calculated optical constants, deposition rate, and thickness. |
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Multiple Layer Acquire Mode
Performs the same fit and calculations as Single Layer Acquire Mode but for multi-layer samples. This mode also allows you to monitor and control your multiple processes using reflectivity, G, t, or a set duration using an input or output trigger voltage. The real-time reflectivity chart shows the reflectivity input data (red), the fit to the reflectivity data (green), and the fitting parameters, n, k, s, G (dep rate), and thickness, plus the approximate error. Once the acquisition is complete, all data, including the raw reflectivity data, fitted reflectivity data, and fit parameters, are stored in the static chart that is displayed at the end of the run. This chart data is stored in the corresponding .kdt file, which is a binary file containing all the data taken during the acquisition. By double-clicking on this static chart, you can plot multiple data series as well as different types of data that were taken during the acquisition. |
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Screen shot of multiple layer acquisition mode, showing real-time reflectivity fitting and calculated optical constants, deposition rate, and total thickness . |
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