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kSA MOS Ultra-Scan - Scanning Curvature and Stress Measurement System
White Papers    

k-Space white papers are documents that describe a technology or technologies utilized by a k-Space product.  White papers can also include calibration procedures, application to various technologies, or comparisons with similar products.

Note that some documents contain proprietary information, and therefore are password protected.  If you are a k-Space customer, please email us to request a username and password, and we will respond via email with a unique login, allowing you access to the document(s).

1. Resolution and sensitivity of stress measurements with the k-Space Multi-beam Optical Sensor (MOS) System (05-19-04)

Eric Chason
Sandia National Laboratories

(requires Adobe reader)

2. kSA MOS Ultra-Scan: Scanning Curvature and Stress Measurement System: (04-14-05) A PDF presentation describing the kSA MOS Ultra-Scan system, including both hardware and software components.  Data taken using the MOS Ultra-Scan is also presented, including stress measured on a Si wafer and a full wafer curvature map.

(requires Adobe reader)