 Data Acquisition Modes
- Focus mode
For facilitating laser alignment and optics focusing by simultaneously monitoring the image and line profile of the laser spot array.
- Curvature/Strain Mode
An arbitrary number of laser spots, user-configured, are tracked concurrently, yielding time-resolved radius of curvature measurements, mean differential spot spacing, and stress, at a single point on a wafer or for calibrating to an optical flat.
- Scan Mode: Selected Area / Line Scan / Full Area Map
An arbitrary number of laser spots, user-configured, are tracked simultaneously, yeilding 2-D curvature, radius of curvature, tilt and stress. Completely programmable scanning over entire range or any sub-range, with programmable step size in both x and y directions. Provides quantitative film stress by first scanning the bare substrate and then re-scanning the sample post-process. Also maps curvature (greater than 50km radius of curvature resolution) of practically any polished surface with 2um spatial resolution.
Analysis Capabilities
- Standard Line Profile: accurately determines beam profiles.
- Statistical Analysis
- Radius of Curvature and Stress Analysis: full surface and polar plots of curvature, tilt, and stress. Alternatively, simple centroid position and spot separation distance may be plotted.
User-friendly Windows 2000/XP environment with extensive error checking and file handling. Data storage in ASCII and binary file formats facilitate alternative data analysis by user. Direct printing of graphics using currently loaded Windows printer drivers. Cut-and-paste directly to clipboard, or into other applications such as MS Word. Transport of graphics directly to Windows clipboard or exported to Windows Metafile or Tiff format.
High-quality 2D and 3D graphics for data display. Numerous image and graphics editing capabilities, including false coloring using pre-loaded or user-defined color palettes, and label editing. Transport of graphics directly to Windows clipboard or exported to Windows Metafile or Tiff format. |
