 High Sensitivity 8-bit Standard Detector * |
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High resolution, high sensitivity, anti-blooming, monochrome CCD detector and power control board. |
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Specifications: |
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| CCD format |
3-phase interline transfer CCD, removable IR cut filter, selectable electronic shutter, AGC (On/Off), Gamma(On/Off), on-chip integration capability |
| Well depth |
100,000 e- |
| Pixel resolution |
768(H) x 480(V), 11um x 13um pixel size |
| Sensing area |
2/3” format (8.8mm x 6.6mm) |
| Spectral range |
400-1100 nm (w/ IR filter out) |
| S/N |
56 dB |
| Sensitivity |
400 lux, f4, under 3200K lighting |
| Exposure time |
Variable from 1/10,000 to 1/30 sec (dip switch selectable) |
| Triggering |
Selectable field-on-demand triggering for synchronization with substrate rotation |
| Output format |
RS-170 |
| Lens mount |
C-type |
| Power |
12V DC (internal from computer) |
| CCD Dimensions |
86mm x 52 mm x 39mm |
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*Optional high-resolution detectors are available at additional cost (see optional hardware.) |
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| Integrated Laser and Optics System |
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The MOS Ultra-Scan system utilizes a pair of etalons to generate a 2-D array of parallel laser beams from a single beam laser source. All optics are rigidly mounted to reduce vibrational noise. The laser system is stabilized and temperature controlled to maximize lifetime. |
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- Diode Laser Module and Custom Optics
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| Fiber coupled, Peltier-cooled laser diode package with integrated current controller and temperature controller. |
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| Laser Wavelength |
660nm nominal (other wavelengths available upon request.) |
| Laser Output Power |
>20 mW, measured directly at laser output. The total output power incident on the sample is typically less than 50 microwatts |
| Beam Geometry |
Circular Gaussian output with integrated long focal length lens cell |
| Operation Mode |
Constant current output |
| Stability |
≤ 0.2% |
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- High Performance Diode Laser Controller
Linear, low-noise diode laser controller operates in constant current mode with output power stability ≤ 0.2% typical (24 hours). Output power is current-limited with slow-start circuitry for extended diode laser life. Output power is computer controlled from threshold power to full rated output. Temperature control is factory set for 13°C and has an absolute stability of <0.2°C.
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Automated Mirror Tracking with Servo Control |
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During full wafer scans the laser array moves across the wafer surface. At different locations on the wafer the curvature will be different, displacing the reflected laser array and causing it to shift off the CCD. Compensation for this shift is made using servo motor control of an optical flat mirror to provide fully automated tracking capability through the MOS Ultra-Scan software. |
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Linear XY Stage and 5-Phase Stepper Controller
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Standard 200mm XY scanning stage, driven by a 5-phase stepper controller. Resolution better than 5um, with maximum scan speed of 20mm/sec. Full stage control via kSA MOS Ultra-Scan software. Optional larger stages scanning up to 300mm samples are also available. |
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| Enclosure |
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0.91m (L) x 0.61m (W) x 1.96m (H) robust steel and aluminum frame enclosure. Vibration dampening integrated into enclosure for improved resolution. Scanning stage and sample area are enclosed with tinted plexiglass for optical and thermal noise isolation. Enclosure doors are interlocked for laser safety. Approximate system weight: 115kg. |
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DELL Pentium Computer System |
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The MOS Ultra-Scan system is supplied with a fully configured DELL computer system. Specifications for the most advanced platform available are listed below.* |
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- Dell Precision Workstation 370 Desktop Computer
- 3.7 GHz Processor with 512KB Cache, Pentium 4
- 800 MHz Front Side Bus
- 19” Flat Panel Monitor
- 1GB, 800MHz, Double Data Rate RAM, ECC, 2 x 512 Memory
- nVidia, Quadro NVS 280, 64MB, dual VGA, Graphics Card
- 80 GB, IDE (ATA-100), 1 inch, 7200 RPM Hard Drive
- 48X CDRW, with Roxio Easy CD Creator
- MS Windows XP Professional Operating System
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*Certain specifications not affecting overall computer performance are subject to change by the manufacturer without notice. |
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| Computer Control Boards |
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Several control boards are used to interface from a host computer to the MOS Ultra-Scan system. The standard system requires three available PCI slots and two additional (PCI) slots for detector power and servo motor interfacing. |
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- Scientific-Grade Analog Frame Digitization Board:
Scientific-grade frame grabber utilizes digital clock sync technology to provide less than ± 5ns jitter. Up to 30 Hz frame rate, no on-board memory (maps directly to host computer RAM or video RAM), runs on PCI bus as bus master. Programmable gain, offset, reference value, and video input. Utilizes speed of PCI bus to perform real-time display on computer monitor. Includes adapter cable for multiple video inputs, digital I/O, and external trigger capability.
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- Multifunction Digital and Analog I/O Board:
High-resolution, 16-bit analog I/O board for control of laser output power and monitoring laser photodiode current. Additional analog input is provided and supported in software for reading instrumentation, such as temperature controllers. A single programmable ±5V, 16-bit analog output is provided for equipment control. Requires one PCI slot.
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- Servo Control Board:
High-resolution, 8-channel servo motor control board with two servo motor amplifiers to control an automated mirror stage. Requires one PCI slot for the board and one additional slot in the riser for cable interfacing.
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| 12-bit High-resolution Detector/Digital Frame Grabber (M-HRD/U) (Optional) |
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The MOS Ultra-Scan system can be configured with a 1300 x 1030 pixel, 12-bit, high-resolution detector. This detector offers a CCD sensor with nearly twice the spatial resolution of our standard 768x480 detector. The increased spatial resolution and bit depth can provide nearly twice the radius of curvature detection capability. |
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Specifications: |
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| CCD format |
Progressive scan, interline transfer |
| Peltier cooling |
none |
| Pixel resolution |
1300(H) x 1030 (V) |
| Pixel size |
6.7 um (H) x 6.7 um (V) |
| Sensing area |
2/3” format (8.8mm x 6.6mm) |
| S/N |
>56 dB |
| Sensitivity |
0.5 lux at f1.4, IR filter out |
| Frame rate |
12 frames/sec max |
| 10-bit specs |
Exposure time 83 usec to 83 msec. |
| Output format |
RS-422 12-bit digital |
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