  Robust steel and aluminum frame enclosure.
Integrated vibration damping and rigidly mounted optics for improved resolution.
Scanning stage and sample area are enclosed with tinted plexiglass for optical and thermal noise isolation.
Enclosure doors are interlocked for laser safety.
Standard 8-bit CCD detector and analog frame grabber. Optional 12-bit high resolution CCD detector and digital frame grabber is also available.
Fiber-coupled, low-noise diode laser operates in constant current mode with output power stability at 0.2% typical (24 hours).
Automated dual-axis, servo-controlled mirror tracking of the reflected laser array as the wafer is scanned.
 The laser system is temperature-controlled to maximize lifetime.
2-D laser array provides surface curvature and stress/strain topography mapping.
Linear xy stage and 5-phase stepper controller for full wafer scanning.
The MOS Ultra-Scan is supplied with a fully configured DELL computer system.
The MOS Ultra-Scan is supplied with an integrated, uninterruptible power supply (UPS) backup.
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