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kSA MOS - Real-time Monitoring of Thin Film Stress
White Papers    

k-Space white papers are documents that describe a technology or technologies utilized by a k-Space product.  White papers can also include calibration procedures, application to various technologies, or comparisons with similar products.

If you are a k-Space customer and do not have a username and password for access to password protected white papers, please contact us via email.

1. Curvature-based Techniques for Real-Time Stress Measurement During Thin Film Growth (06-26-02)

Jerrold A. Floro and Eric Chason
Sandia National Laboratories, Albuquerque, NM 87185-1415

2. Use of kSA MOS System for Stress and Thickness Monitoring during CVD Growth (05-17-00)

Eric Chason
Brown University, April, 2000

3. A Laser-Based Thin-Film Growth Monitor (04-25-02)

Charles Taylor, Darryl Barlett, Eric Chason, and Jerry Floro
The Industrial Physicist, March 1998 (p.26-30)

4. Resolution and sensitivity of stress measurements with the k-Space Multi-beam Optical Sensor (MOS) System (05-19-04)

Eric Chason
Sandia National Laboratories

(Application Notes require Adobe reader)