k-Space white papers are documents that describe a technology or technologies utilized by a k-Space product. White papers can also include calibration procedures, application to various technologies, or comparisons with similar products.
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1. Curvature-based Techniques for Real-Time Stress Measurement During Thin Film Growth (06-26-02)
Jerrold A. Floro and Eric Chason
Sandia National Laboratories, Albuquerque, NM 87185-1415
2. Use of kSA MOS System for Stress and Thickness Monitoring during CVD Growth (05-17-00)
Eric Chason
Brown University, April, 2000
3. A Laser-Based Thin-Film Growth Monitor
(04-25-02)
Charles Taylor, Darryl Barlett, Eric Chason, and Jerry Floro
The Industrial Physicist, March 1998 (p.26-30)
4. Resolution and sensitivity of stress measurements with the k-Space Multi-beam Optical Sensor (MOS) System
(05-19-04)
Eric Chason
Sandia National Laboratories
(Application Notes require Adobe reader)
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