   Film thickness can be read directly from thickness monitors using configurable 16-bit analog inputs. Alternatively, the user can input the deposition rate. Software support for direct measurements of film thickness using oscillations in the reflected laser intensity is available as MOS-SM option.
16-bit analog output, software configurable for use as real-time feedback to deposition equipment. For example, film stress/strain can be can figured and output as an error signal to control deposition rate, chamber pressure or substrate temperature, etc.
For time-resolved acquisition modes, a delay time between image acquisitions, accurate to 1 msec, may be selected.
External triggering can be used to time data acquisition with external events or substrate rotation.
High-quality 2D and 3D graphics for data display. Numerous image and graphics editing capabilities, including false coloring using pre-loaded or user-defined color palettes, and label editing. Transport of graphics directly to Windows clipboard or exported to Windows Metafile or Tiff format.
Data Acquisition Modes
- Focus mode
For facilitating laser alignment and optics focusing by simultaneously monitoring the image and line profile of the laser spot array.
- Curvature/Strain Mode
An arbitrary number of laser spots, user-configured, are tracked concurrently, yielding time-resolved radius of curvature measurements, mean differential spot spacing, stress, and simultaneous intensity oscillation (determines film thickness). The mean differential spot spacing is used to calculate time-resolved stress or stress thickness product using material parameters and growth rate.
Analysis Capabilities
- Line profile: accurately determines beam profiles.
- Radius of curvature and stress analysis: yields calculation of radius of curvature, stress-thickness product, or relative stress as a function of time, temperature, or other user-configurable input. Alternatively, simple centroid position and spot separation distance may be plotted.
(Optional) Growth Rate Monitor for the kSA MOS Software
- Real-time update of current n, k, and deposition rate values and standard deviation of these values.
- Ability to generate a thin-film deposition recipe, so multiple layers can be properly fit in real-time. Each layer in the recipe will have a user-estimated n, k, and G value. Each layer can be triggered via an external trigger signal or can be time-based.
- Optional ability to output deposition rate, thickness, n, and k to analog output channels for input into process control system.
- External triggering can be used to time data acquisition with external events or substrate rotation if required.
- Reflected intensity oscillation data recorded during growth can provide accurate film thickness and optical constant determination.
User-friendly Windows 2000/XP environment with extensive error checking and file handling. Data storage in ASCII and binary file formats facilitate alternative data analysis by user. Direct printing of graphics using currently loaded Windows printer drivers. Cut-and-paste directly to clipboard, or into other applications such as MS Word. Transport of graphics directly to Windows clipboard or exported to Windows metafile or tiff format.
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