  Optional 12-bit high resolution CCD detector and digital frame grabber. Nearly twice the spatial resolution of our standard detector.
Flange mounting assemblies for single-port (normal incidence) or two-port configurations (consisting of a laser housing and a detector housing) are available, as well as custom mounts to accommodate any chamber configuration. Bench-top, ex-situ MOS systems are also available. (Note: In order to view the 3-D models you will need to use Internet Explorer and install e-drawings when prompted)
A 2-D array of parallel laser beams are generated from a single beam laser source.
The MOS system is extremely robust; simultaneous detection of the laser spot array makes the measurement virtually immune to vibration.
All optics are rigidly mounted to reduce vibrational noise.
Fiber coupled, peltier-cooled laser diode package with integrated current and temperature controller.
The laser system is stabilized and temperature-controlled to maximize lifetime.
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| Schematic illustration of the MOS system. |
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2-dimensional laser array can provide surface curvature and strain topography mapping.
The MOS system is supplied with a fully configured DELL computer system.
The MOS system uses several control boards to interface from a host computer to the system. The standard system requires three available PCI slots and two additional (ISA or PCI) slots for detector power and servo motor interfacing.
External triggering capability allows measurements
during substrate rotation.
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