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kSA BandiT - Real-time Wafer Temperature Sensing
Performance Specifications    

Wavelength Ranges:

380-1100 nm1
875-1400 nm2

Temperature Update Rate:

20 Hz typical, 1 Hz minimum

Typical Temperature Ranges:

ZnSe: RT – 700 °C1
ZnTe: RT – 700 °C1
SiC: Call for info1
GaN: Call for info1
GaAs: RT - 690 °C2
InP: RT - 650 °C2
Si: RT – 550 °C2

Temperature Resolution: 0.1 °C
Stability: +/- 0.2 °C (4 hours)
Accuracy: +/- 2 °C
Outputs: - Real-time display
-
10V analog (configurable)
Inputs: - analog (configurable)
  Original BandiT system with detector, light source, and rack mount
         

 

1 B-VIS model
2 B-NIR mode