 |
|
|
 |
kSA BandiT - Real-time Wafer Temperature Sensing |
 |
 |
| Hardware - Specifications |
|
|
 Light Source
- 150W halogen lamp with gold-coated parabolic reflector, directly mounts to available viewport.
- Real-time output power control via BandiT software.
- Internal feedback control for stable intensity and spectral output.
- Dimensioned drawing of the BandiT Light Source
|
 |
|
Light Source Housing |
| |
|
|
 |
|
Detector Housing |
|
|
Spectrometer
| |
|
|
Visible Model (B-VIS):
- 512 element, Peltier-cooled, CCD array
- Wavelength Range: 380 nm – 1100 nm
NIR Model (B-NIR):
- 128-element InGaAs, temperature stabilized, photodiode array
- Wavelength Range: 875 nm – 1400 nm
|
| |
|
|
| |
|
|
|
|
