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kSA BandiT - Real-time Wafer Temperature Sensing
Application Notes    

kSA BandiT Application Notes are documents written about a specific component or components of the kSA BandiT wafer temperature sensor.  These documents are designed to explain details of the kSA BandiT capabilities and aid the user in maximizing the utility of the system.  k-Space User Manuals are available for download in pdf, html, and Microsoft WinHelp format.  

Note that some documents contain proprietary information, and therefore are password protected.  If you are a k-Space customer, please email us requesting a username and password, and we will respond via email with a proper username and password, allowing you access to the document.

1. BandiT Spectrometer Calibration (2-11-05) This document describes the procedure for checking the calibration of the spectrometer.

2. Pyrometric Oscillations For Growth Rate (3-16-05) - This document describes BandiT's ability to determine deposition rate from pyrometric interference oscillations.  This capability is built-in to BandiT, making it a dual purpose temperature and deposition rate monitoring tool.

(all Application Notes require Adobe reader)