k-Space Associates, Inc.

Leaders in Advanced Thin-Film Metrology Solutions for Research, Development, and Production

k-Space Associates, Inc. is a leading manufacturer of in-situ, in-line, and ex-situ metrology tools for the semiconductor, thin-film, and photovoltaic (PV) industries.  Our tools are used for monitoring nearly all thin-film deposition processes, including MBE, MOCVD, PLD, PVD, sputtering, and evaporation.  Incorporated in 1992 and driven to supply the best technical support in the industry, our tools are used worldwide in both research and full production monitoring of semiconductor, PV, and thin-film deposition, annealing, and processing applications.

We will be closed Dec. 22-26 for Christmas and Dec. 31 – Jan. 2nd for the New Year. Happy Holidays!

  • ProductkSA BandiT

    Repeatable and Accurate Temperature Measurement

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  • ProductkSA MOS

    2D Real-Time, In-Situ Film and Thermal Stress Monitoring

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  • Product kSA MOS Ultra/Thermal-Scan

    2D Film Stress and Absolute Curvature Mapping

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  • ProductkSA ICE

    Real-Time, In-Situ Process Monitoring and Control for MOCVD

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  • ProductkSA BandiT PV

    In-line PV Process Monitoring to Increase Performance and Yield

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  • ProductkSA RateRat

    Real-time Thickness Monitoring of Multilayer Thin Films

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  • ProductkSA 400

    The World's Leading Analytical RHEED System

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ProductOverviewSmall

In-House Metrology Services

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What do you want to measure?

k-Space metrology tools focus on real-time data acquisition, processing, and analysis of nearly all deposition parameters of importance, including:

 

kSA BandiT: In-situ measurement via Band Edge, Blackbody, and Pyrometry, typically used in MBE, PLD, ALD, sputtering, and e-beam evaporation deposition environment

kSA BandiT PV: In-line measurement via Band Edge, Blackbody, and Pyrometry, ideal for thin film photovoltaic metrology applications, including in-line production measurement.

kSA ICE: In-situ modular tool for measurement via individual Emissivity Corrected Pyrometry (ECP), Blackbody, and/or Band Edge Modules, ideal for MOCVD reactors with either high speed or low speed rotation and limited optical access.

In-Situ Thin-Film Stress, Strain and Wafer Curvature

kSA MOS: In-situ tool for measuring real-time film stress, film strain, and wafer curvature induced by thin films or thermal processes on a substrate/wafer.

kSA ICE MOS Module: In-situ modular tool for measuring real-time film stress, film strain and wafer curvature induced by thin films or thermal processes on a substrate/wafer, ideal for MOCVD reactors with high speed or low speed rotation and limited optical access.

Ex-Situ Thin-film Stress, Strain, Wafer  Curvature, Bow, and Tilt

kSA MOS Ultra-Scan/Thermal-Scan: Ex-situ tool with full 2D wafer mapping, for measuring film stress, film strain, and wafer curvature, bow, and tilt induced by thin films or thermal processes on a substrate/wafer.

In-Situ Thin-Film Stress, Strain and Wafer Curvature

kSA MOS: In-situ tool for measuring real-time film stress, film strain, and wafer curvature induced by thin films or thermal processes on a substrate/wafer.

kSA ICE MOS Module: In-situ modular tool for measuring real-time film stress, film strain and wafer curvature induced by thin films or thermal processes on a substrate/wafer, ideal for MOCVD reactors with high speed or low speed rotation and limited optical access.

Ex-Situ Thin-film Stress, Strain, Wafer  Curvature, Bow, and Tilt

kSA MOS Ultra-Scan/Thermal-Scan: Ex-situ tool with full 2D wafer mapping, for measuring film stress, film strain, and wafer curvature, bow, and tilt induced by thin films or thermal processes on a substrate/wafer.

kSA 400: In-situ tool for measurement via real-time analysis of RHEED (Reflection High Energy Electron Diffraction) patterns, for systems equipped with a RHEED electron gun and phosphor screen. Surface quality is determined by analyzing the RHEED streak profile. RHEED guns are typically installed in MBE and PLD reactors, and occasionally in sputter deposition tools.

kSA BandiT: In-situ measurement via above-gap scatter signal, typically used in MBE, PLD, ALD, sputtering, and e-beam evaporation deposition environments.

kSA BandiT PV: In-line measurement via above-gap scatter signal, ideal for thin film PV applications, including in-line production measurement.

kSA ICE: In-situ modular tool for measurement, measures surface roughness via analysis of above gap scatter signal (must have Band Edge module), ideal for MOCVD reactors with either high speed or low speed rotation and limited optical access.

kSA 400: In-situ tool for measurement via real-time analysis of RHEED (Reflection High Energy Electron Diffraction) patterns, for systems equipped with a RHEED electron gun and phosphor screen. RHEED guns are typically installed in MBE and PLD reactors, and occasionally in sputter deposition tools.

kSA RateRat Pro: In-situ tool for measurement via real-time analysis of thin film interference oscillations during deposition.

kSA BandiT: In-situ tool for measurement via real-time analysis of below gap spectral interference oscillations.

kSA MOS: MOS software option provides in-situ measurement via real-time analysis of thin film interference fringes (similar to RateRat technology).

kSA ICE: In-situ modular tool for measurement via individual Emissivity Corrected Pyrometry (ECP), MOS, and/or RateRat modules, ideal for MOCVD reactors with high or low speed rotation and limited optical access.

kSA BandiT PV: In-line photovoltaic metrology tool used for analysis of absorption edge, ideal for thin film PV applications, including in-line production measurement.

kSA 400: In-situ atomic spacing measured in real-time from a calibrated RHEED (Reflection High Energy Electron Diffraction) pattern, for systems equipped with a RHEED electron gun and phosphor screen. RHEED guns are typically installed in MBE and PLD reactors, and occasionally in sputter deposition tools.

 

We also supply ex-situ wafer and surface analysis tools which perform full curvature, stress, and wafer bow mapping on up to 300mm wafers. Please feel free to browse our Applications page, scan through our Products, fill out our online form or contact us for further information. We look forward to hearing from you!

World Class Technical Support

We take pride in providing the best technical support in the industry. No automated queues, no slow response times. When you call, you’ll always get a friendly k-Space person to direct your call to the appropriate engineer. Or, contact us via email – we guarantee we’ll respond within 1 business day. Contact us today so we can discuss your metrology needs.

We look forward to hearing from you!

Take a Tour of k-Space

Curious about our company? Check out our video featuring our facility, our people and where we turn ideas into reality!

kSA 400: In-situ atomic spacing measured in real-time from a calibrated RHEED (Reflection High Energy Electron Diffraction) patterns, for systems equipped with a RHEED electron gun and phosphor screen.  RHEED guns are typically installed in MBE and PLD reactors, and occasionally in sputter deposition tools.

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